光学精密工程2012，Vol.20Issue(2)：313-320,8.DOI:10.3788/OPE.20122002.0313
高精度无导轨位移平台误差分析
Error analysis of precise non-guiding displacement platform
摘要
Abstract
The motion accuracy of a platform based on two compensated flexible four-bar linkages was researched and three error sources, namely, batten size error, the sphere center distance error of ratio lever and the assembling angle between the inner and external battens were analyzed. A semi-beam model was established to analyze the deformation of the batten and the relationship between working displacement and coupled displacement. The expressions of the platform straightness error and the limiting coupled displacement error which was concerned with the platform displacement and the batten sizes were derived. Finally,an autocollimator and a high precise measuring head were used in the measurements of the platform straightness and the coupled displacement. The experimental results show that the straightness error is smaller than 1. 5″ and the coupled displacement error is less than 13. 7 μm when the stroke of the displacement platform is no longer than 5 mm. It is proved that the platform works with high motion accuracy and the experimental result is consistent with the analysis results.关键词
位移平台/直线度/耦合位移/柔性四杆机构/变形板Key words
displacement platform/ straightness/ coupled displacement/ flexible four-bar linkage/batten分类
机械制造引用本文复制引用
曹佃生,高云国..高精度无导轨位移平台误差分析[J].光学精密工程,2012,20(2):313-320,8.基金项目
中国科学院长春光学精密机械与物理研究所三期创新工程资助项目(No.061X20C060) （No.061X20C060）
