华东理工大学学报：自然科学版2011，Vol.37Issue(4)：474-482,9.
表面微加工MEMS三维模型的局部变动
Local Variation for 3D Geometric Model of Surface Micromachined MEMS Devices
摘要
Abstract
In the design of MEMS device,a main problem is to lack the variation method of orienting optimization.By analyzing the manufacturability,this paper proposes a local variation method for 3D geometric model of surface micromachined MEMS devices.Firstly,a concerned face is selected on the 3D geometric model,and a local variation operation is executed in the chosen face.Secondly,the variation operation is mapped automatically and propagated to the 3D geometric model based on manufacturability analysis.Thirdly,a certain mask is determined via variation mapping and propagation of 3D model,and this mask is updated to keep the consistency of the geometrical model and process model.Finally,the experiment results show that the proposed method can effectively achieve the local variation of the 3D geometric model,and promote the efficiency of designer.关键词
表面微加工/微机电系统/变动/掩模映射Key words
surface micromachining/MEMS/variation/mask synthesis分类
信息技术与安全科学引用本文复制引用
凌浩,李建华,刘玉生,郭卫斌,何高奇..表面微加工MEMS三维模型的局部变动[J].华东理工大学学报：自然科学版,2011,37(4):474-482,9.基金项目
国家自然科学基金 （）
上海市自然科学基金项目 （）
