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低能离子注入种子的深度浓度分布的模拟

王林香 祝恒江 郭常新 王世亨

核农学报2011,Vol.25Issue(5):886-891,6.
核农学报2011,Vol.25Issue(5):886-891,6.

低能离子注入种子的深度浓度分布的模拟

SIMULATION OF THE DEPTH-CONCENTRATION DISTRIBUTION FOR LOW ENERGY IONS IMPLANTED INTO SEED

王林香 1祝恒江 1郭常新 2王世亨3

作者信息

  • 1. 新疆师范大学物理系,新疆乌鲁木齐830054
  • 2. 中国科学技术大学物理系,安徽合肥230026
  • 3. 新疆大学物理系,新疆乌鲁木齐830046
  • 折叠

摘要

Abstract

The depth-concentration distributions for 20keV titanium ions implanted into color cotton seed and peanut seed were calculated in one and two dimensional models using the Monte Carlo method.Compared with the computational results of TRIM procedure and Gaussian fitting,the computational results of the two dimensional model proposed by this study were well matched with experiment results.The depth-concentration distributions for 110keV iron ion under the different doses implanted into the color cotton seed and the peanut seed were caculated using the two dimensional models.The computational results were analyzed and discussed.The depth-concentration distributions were predicted respectively for iron and nitrogen ions with 20keV energy implanted into color cotton seed and peanut seed using this model,and the results showed that the two dimensional computational model in this study was relatively reasonable and provided a theoretical calculation method for the interaction mechanism of the implantation ions and seed material.

关键词

离子注入/TRIM程序/高斯拟合/随机抽样/深度浓度分布

Key words

ion implantation/TRIM program/Gaussian fitting/random sampling/depth-concentration distribution

分类

化学化工

引用本文复制引用

王林香,祝恒江,郭常新,王世亨..低能离子注入种子的深度浓度分布的模拟[J].核农学报,2011,25(5):886-891,6.

基金项目

新疆师范大学高校科研计划优秀青年教师科研启动基金 ()

核农学报

OA北大核心CSCDCSTPCD

1000-8551

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