化学工程2011，Vol.39Issue(11)：39-43,5.
SiHCl3氢还原过程的热力学分析
Thermodynamic analysis of SiHCl3 hydrogen reduction process
摘要
Abstract
The complex chemical reactions in the Si-Cl-H system with relation to modified Siemens process were studied based on the thermodynamic data of related substance. And the influence of the temperature, pressure and initial feed mole ratio n( H2)/n( SiHCl3) on the silicon yield was investigated. The diagrams of the silicon yield as a function of temperature, pressure and initial feed ratio were plotted, respectively. The silicon yield is relatively high at high temperature, low pressure and big initial feed ratio n(H2)/n(SiHCl3) in the SiHCl3 hydrogen reduction system. The gas equilibrium composition diagrams were plotted as a function of temperature when the initial feed ratio re(H2)/re(SiHCl3) is 15 and the pressure is 150 kPa. Under the optimum conditions of 1 425 K, 150 kPa and the initial feed mole ratio of 15, the yield of silicon is 34.815%.关键词
热力学/多晶硅/改良西门子法/硅产率Key words
thermodynamics/polysilicon/modified Siemens process/silicon yield分类
化学化工引用本文复制引用
何恩,谢刚,侯彦青,林艳,俞小花..SiHCl3氢还原过程的热力学分析[J].化学工程,2011,39(11):39-43,5.基金项目
国家自然科学基金资助项目(50574045) （50574045）
