激光技术2012，Vol.36Issue(1)：37-41,5.DOI:10.3969/j.issn.1001-3806.2012.01.011
Ronchi光栅误差的数值仿真
Error simulation of Ronchi gratings
杨仁付 1朱孝立 1陈军宁2
作者信息
- 1. 安徽财贸职业学院电子信息系,合肥230601
- 2. 安徽大学电子科学与技术学院,合肥230039
- 折叠
摘要
Abstract
In order to study the effect of grating manufacturing error on the accuracy of Moire metrology, a transmittance function for Moir6 fringes was built based on Fourier optical theory and coordinate conversion. The grating error function was simulated by means of linear superimposition. The grating errors were simulated based on previously received moire fringe models. The Moire fringe waveform caused by the short-period errors and long-period errors were obtained. Simulation results were analyzed and verified. Although short-period grating error induces high-order harmonics of Moire fringe signal, its effect on measurement accuracy can be effectively removed after digital filtering. The long-period grating error can affect the accuracy of a grating test system.关键词
衍射与光栅/误差/莫尔条纹/仿真/傅里叶变换Key words
diffraction and grating/ error/ Moir￡ fringe/ simulation/ Fourier transform分类
数理科学引用本文复制引用
杨仁付,朱孝立,陈军宁..Ronchi光栅误差的数值仿真[J].激光技术,2012,36(1):37-41,5.
