激光技术2012,Vol.36Issue(1):120-123,4.DOI:10.3969/j.issn.1001-3806.2012.01.031
高功率激光反射镜热畸变补偿结构设计与仿真
Simulation and structure design of a high power laser mirror with self-compensation of thermal distortion
摘要
Abstract
A high-power laser mirror with self-compensation for thermal distortion was presented and numerically simulated on the basis of its thermal deformation behavior after optimizing its substrate structure. When 7kW laser was input in 17cm diameter, and the reflectivity of the mirror was 98% , the difference between central maximum thermal distortion and boundary thermal distortion within laser radiation region on the mirror surface for the general silicon substrate ( peak valley values) was 0. 167μm, 0. 174μm and 0. 172μm respectively, under the radiation time of 2s, 4s and 10s. However, the thermal distortion difference (peak valley values) of the laser mirror with self-compensation of thermal distortions was 0. 092μm, 0.052μm, 0. 027μm, respectively. The study results are useful for improving the heat-effective stability and beam quality.关键词
光学器件/激光反射镜/热畸变/自补偿/高能激光Key words
optical devices/ laser mirrors/ thermal distortion/ self-compensation/ high-power laser分类
信息技术与安全科学引用本文复制引用
彭玉峰,吴定允,张毅,程祖海..高功率激光反射镜热畸变补偿结构设计与仿真[J].激光技术,2012,36(1):120-123,4.基金项目
国家自然科学基金资助项目(61077037) (61077037)
河南省基础与前沿技术计划资助项目(102300413214) (102300413214)