金刚石与磨料磨具工程2011，Vol.31Issue(6)：7-11,5.
热丝化学气相沉积法制备优质微米亚微米级单晶金刚石的研究
Preparation and characterization of high quality micro/submicro single crystal diamonds by hot filament CVD method
摘要
Abstract
High quality micro/submicro diamonds with euhedral diamond faces were prepared using hot filament chemical vapor deposition technique (HFCVD). The micro single crystal diamonds (> 1 μm) were deposited on the diamond seeds in the size of 1 (μm synthesized under high pressure and high temperature (HPHT). The photoresist solution with diamond seeds were dispersed uniformly on silicon wafers using a spin coater machine. After 2 hours deposition, the defects of the HPHT diamond seeds were eliminated. After 6 hours depositionn, the diamonds of 4 (μm with well-defined morphology were obtained. Meanwhile, the submicron single crystal diamonds (<1 μm) were directly deposited on silicon wafers. The crystal density and size were controlled by adjusting the deposition parameters,such as the pre-treatment method for substrate, bias current and deposition time. After 2 hours deposition, icosahedron crystals with size of 0.7 μm were successfully prepared.关键词
热丝化学气相沉积法/微米级单晶金刚石沉积参数Key words
hot filament chemical vapor deposition/ micro/submicro single crystal diamonds/ deposition parameters分类
化学化工引用本文复制引用
张韬,沈彬,孙方宏,张志明..热丝化学气相沉积法制备优质微米亚微米级单晶金刚石的研究[J].金刚石与磨料磨具工程,2011,31(6):7-11,5.基金项目
国家自然科学基金资助项目(NO.50975177,NO.51005154) （NO.50975177,NO.51005154）
