计量学报2011，Vol.32Issue(6)：490-494,5.DOI:10.3969/j.issn.1000-1158.2011.06.03
波片和偏振片对外差干涉仪非线性的影响
Effect of Wave Plates and Polarizer on the Nonlinearity of Heterodyne Interferometers
摘要
Abstract
To reduce the nonlinearity error of heterodyne interferometer, the influence mechanics of wave plate and polarizer upon nonlinearity error must be determined. Theoretical and experimental analysis showed that different influence on non-linearity exits when wave plate and polarizer were placed in the front of or behind the polarized beam splitter. If the error wave plate and polarizer were placed in front of the polarization beam splitter,non-linearity was introduced definitely due to error. If the same optical components are installed inside the interferometer,it is possible to affect the nonlinearity, but usually with a factor in an order of about 10 -2.关键词
计量学/外差干涉仪/偏振分光镜/波片/偏振片/非线性Key words
Metrology/ Heterodyne interferometer/ Polarizing beam splitter/ Wave plates/ Polarizer/ Nonlinearity分类
通用工业技术引用本文复制引用
任晓,侯文玫..波片和偏振片对外差干涉仪非线性的影响[J].计量学报,2011,32(6):490-494,5.基金项目
国家教委博士点基金(200802520005) （200802520005）
上海市教委重点学科第五期基金(J50505) （J50505）
