江西科学2011，Vol.29Issue(4)：455-457,476,4.
脉冲阴极弧放电制备碳膜及其性能研究
Prepare and Research about Carbon Film Made by Pulse Cathodic Arc Discharge
摘要
Abstract
We use a self-built high-voltage pulsed power get the glow discharge and the use of PLC control SCR triggering device for generating a single pulse microsecond are discharge, and we measured discharge-voltage and discharge-current with an oscilloscope. We plate films in different voltages, distances and pressures. We analysis the films through the ways of electron microscopy and XRD methods. We prepare better uniform films which have good crystallization properties in appropriate voltage, air pressure and distance.关键词
脉冲电源/脉冲阴极弧/PLC/碳膜Key words
Pulse power/Pulse cathodic arc/PLC/Carbon film分类
数理科学引用本文复制引用
杨伟平,宗泽源,施芸城,汪华磊..脉冲阴极弧放电制备碳膜及其性能研究[J].江西科学,2011,29(4):455-457,476,4.
