理化检验：物理分册2011，Vol.47Issue(12)：786-789,4.
扫描电子显微镜低真空模式的应用
Application of the Low Vacuum Mode for SEM
许亚娟 1陈剑峰 2项彬 1宋子濂1
作者信息
- 1. 中国铁道科学研究院金属及化学研究所,北京100081
- 2. FEI公司（上海）,上海201203
- 折叠
摘要
Abstract
Low vacuum mode is a late-model kind of observing pattern for SEM.Its biggest characteristic is direct observation of non-conductive samples.In such a way,either the pseudo image caused by electric charge accumulation on the surface of non-conductive samples was avoided or the conductive coating on the surface of the samples was saved.Moreover,it facilitates testing and analysis of other information of the non-conductive sample.In addition,low vacuum mode is carried out on the samples that are not tight for direct observation,which is no substitute for high vacuum.关键词
扫描电镜/低真空模式/应用/不导电样品/多孔样品Key words
SEMi low vacuum mode/application/non-conducting sample/porous sample分类
矿业与冶金引用本文复制引用
许亚娟,陈剑峰,项彬,宋子濂..扫描电子显微镜低真空模式的应用[J].理化检验：物理分册,2011,47(12):786-789,4.
