宁夏工程技术2011，Vol.10Issue(4)：303-305,308,4.
CZ单晶炉中碳和氧的产生及其对单晶硅生长的影响
Generation of carbon and oxygen in CZ elemental crystal furnace and the influence of monocrystalline silicon growth
摘要
Abstract
In this paper,elemental crystal furnace,FT-CZ2008 type,made in Ferro Tec group,is research object.The basic structure of CZ elemental crystal furnace is introduced,and the growth techniques of monocrystalline silicon are expounded.Influence factors of carbon and oxygen generating in this system is analyzed from 3 aspects,the structure of elemental crystal furnace and monocrystalline silicon production technology and others.Experimental data and influence degree from carbon and oxygen to monocrystalline silicon production quality is concluded.Help for enterprise can be expected in further improving structure of elemental crystal furnace,reforming technology of the monocrystalline silicon growth and improving the quality of the monocrystalline silicon production.关键词
CZ单晶炉/碳/氧/单晶硅Key words
CZ elemental crystal furnace/carbon/oxygen/monocrystalline silicon分类
化学化工引用本文复制引用
曾建平..CZ单晶炉中碳和氧的产生及其对单晶硅生长的影响[J].宁夏工程技术,2011,10(4):303-305,308,4.基金项目
西安隆基硅材料股份有限公司科技攻关基金资助项目 （）
