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新型大气压微波等离子体炬的仿真研究

陈颖 李承跃 季天仁

强激光与粒子束2011,Vol.23Issue(10):2715-2718,4.
强激光与粒子束2011,Vol.23Issue(10):2715-2718,4.DOI:10.3788/HPLFB20112310.2715

新型大气压微波等离子体炬的仿真研究

Simulation study on atmospheric pressure microwave plasma torch

陈颖 1李承跃 1季天仁2

作者信息

  • 1. 电子科技大学物理电子学院,成都610054
  • 2. 成都纽曼和瑞微波技术有限公司,成都610052
  • 折叠

摘要

Abstract

An atmospheric pressure microwave plasma torch(MPT) operating at 2. 45 GHz was designed. Corresponding simulation based on HFSS code was performed and the influences of structure parameters on the E-field distribution in the device were analyzed. The results indicate that the use of coupling probe will have a distinct impact on the field distribution in the device. A MPT with strong electric field amplitude and high Q-factor about 20 000 was achieved in simulation by adjusting the structure parameters, which could produce microwave plasma at atmospheric pressure.

关键词

微波等离子体炬/大气压/HFSS软件/探针/电场强度

Key words

microwave plasma torch/atmospheric pressure/HFSS code/probe/electric field strength

分类

数理科学

引用本文复制引用

陈颖,李承跃,季天仁..新型大气压微波等离子体炬的仿真研究[J].强激光与粒子束,2011,23(10):2715-2718,4.

强激光与粒子束

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