强激光与粒子束2011,Vol.23Issue(10):2715-2718,4.DOI:10.3788/HPLFB20112310.2715
新型大气压微波等离子体炬的仿真研究
Simulation study on atmospheric pressure microwave plasma torch
陈颖 1李承跃 1季天仁2
作者信息
- 1. 电子科技大学物理电子学院,成都610054
- 2. 成都纽曼和瑞微波技术有限公司,成都610052
- 折叠
摘要
Abstract
An atmospheric pressure microwave plasma torch(MPT) operating at 2. 45 GHz was designed. Corresponding simulation based on HFSS code was performed and the influences of structure parameters on the E-field distribution in the device were analyzed. The results indicate that the use of coupling probe will have a distinct impact on the field distribution in the device. A MPT with strong electric field amplitude and high Q-factor about 20 000 was achieved in simulation by adjusting the structure parameters, which could produce microwave plasma at atmospheric pressure.关键词
微波等离子体炬/大气压/HFSS软件/探针/电场强度Key words
microwave plasma torch/atmospheric pressure/HFSS code/probe/electric field strength分类
数理科学引用本文复制引用
陈颖,李承跃,季天仁..新型大气压微波等离子体炬的仿真研究[J].强激光与粒子束,2011,23(10):2715-2718,4.