强激光与粒子束2011，Vol.23Issue(10)：2817-2820,4.DOI:10.3788/HPLPB20112310.2817
大功率光导开关硅微通道散热器设计与测试
Design and test of silicon micro-channel cooler for high power photoconductive semiconductor switch chip
摘要
Abstract
Temperature rise and hot spot formation in photoconductive semiconductor switch(PCSS) chip caused by joule heating restrain the PCSS's power, repetition rate and lifetime, thus active cooling technology is necessary. In the paper, a high efficiency silicon rectangular micro-channel cooler is designed and experimentally tested. The cooler has two sections, principal frame and cover, joined by Si-Si bonding. The former section has an array of micro-channels between the distributary groove and the conflux groove, and the latter is punched by semiconductor etching technology. With water as coolant, the heat flux, temperature uniformity and fluid pressure drop at different coolant volumetric flow rate and inlet temperature are tested. The experimental results indicate that the cooler has a high heat transfer efficiency, low fluid pressure drop and good temperature uniformity at a moderate coolant volumetric flow rate. The silicon rectangular micro-channel cooler is applicable to high power repetitive PCSS chip cooling.关键词
光导开关/矩形微槽/硅微通道散热器/表面传热系数/压力降Key words
photoconductive semiconductor switches/ rectangular micro-grooves/ silicon micro-channel cooler/ heat transfer coefficient/pressure drop分类
信息技术与安全科学引用本文复制引用
赵越,谢卫平,刘宏伟,刘金锋,李洪涛,袁建强..大功率光导开关硅微通道散热器设计与测试[J].强激光与粒子束,2011,23(10):2817-2820,4.基金项目
国家自然科学基金项目(50837004) （50837004）
中国工程物理研究院科学技术发展基金项目(2008B0402037,2009B0402040) （2008B0402037,2009B0402040）
