人工晶体学报2011，Vol.40Issue(5)：1353-1357,5.
晶体生长过程建模及解耦控制
Modeling of Crystal Growth Process and Its Decoupling Control
摘要
Abstract
In the process of growing crystal, the crystal diameter was controlled through adjusting the crystal lift rate and the heater temperature. Therefore, the crystal diameter control system is a multiple input multiple output system. Two input variables are the heater temperature and the crystal lift rate respectively. Two output variables are the crystal diameter and the crystal growing rate respectively. The inputs and outputs are mutally coupling. The feedfarward compensation decoupling method is proposed for decoupling control of the crystal growth control system. Simulation result and the corresponding experiment result show the effectiveness of the method.关键词
单晶炉/双入双出系统/解耦控制/前馈补偿Key words
single crystal furnace/ dual input dual output system/ decoupling control/ feedforward compensation分类
数理科学引用本文复制引用
王庆,姜雷,张婷曼..晶体生长过程建模及解耦控制[J].人工晶体学报,2011,40(5):1353-1357,5.基金项目
国家科技重大专项(2009ZX02011) （2009ZX02011）
