人工晶体学报2011，Vol.40Issue(6)：1387-1393,7.
铝诱导纳米硅制备大晶粒多晶硅薄膜的研究
Research on Preparation of Large Grain Size Polycrystalline Silicon Thin Films by Aluminum-induced Crystallization from Nanocrystalline Silicon
摘要
Abstract
The glass/nc-Si/Al layered structures were prepared by HWCVD and magnetron sputtering on high transparence glass substrate. The layered structures were kept in a tube furnace at H2 atmosphere for 5 h to undertake an aluminum-induced crystallization process. The prepared samples were characterized by XRD, optical microscope, SEM and Raman spectrum. Polycrystalline film with a strong (111) orientation was found in all samples. The grain size up to 400 μm was formed in the sample treated at 425 ℃ in a discontinuous film. As the temperature increased to 450 ℃, continuous polycrystalline film with smaller grain size was produced. For samples prepared at 475 ℃, the polycrystalline film presents even better crystal quality with a maximum grain size about 200 μm. In addition, the crystallization mechanism of AIC from nanocrystalline silicon from the point of view of dynamics was carried out. The glass/nc-Si/Al layered structures were prepared by HWCVD and magnetron sputtering on high transparence glass substrate. The layered structures were kept in a tube furnace at H2 atmosphere for 5 h to undertake an aluminum-induced crystallization process. The prepared samples were characterized by XRD, optical microscope, SEM and Raman spectrum. Polycrystalline film with a strong (111) orientation was found in all samples. The grain size up to 400 μm was formed in the sample treated at 425 ℃ in a discontinuous film. As the temperature increased to 450 ℃, continuous polycrystalline film with smaller grain size was produced. For samples prepared at 475 ℃, the polycrystalline film presents even better crystal quality with a maximum grain size about 200 μm. In addition, the crystallization mechanism of AIC from nanocrystalline silicon from the point of view of dynamics was carried out.关键词
大晶粒/多晶硅薄膜/铝诱导/纳米硅Key words
large grain size/ polycrystalline silicon film/ aluminum-induced/ nanocrystalline silicon分类
数理科学引用本文复制引用
方茹,沈鸿烈,吴天如,刘斌,沈剑沧..铝诱导纳米硅制备大晶粒多晶硅薄膜的研究[J].人工晶体学报,2011,40(6):1387-1393,7.基金项目
国家高技术研究发展计划(863计划)资助项目(2006AA03Z219) （863计划）
江苏高校优势学科建设工程资助项目 （）
