人工晶体学报2011，Vol.40Issue(6)：1547-1551,5.
不同能量密度下脉冲激光烧蚀制备纳米Si晶粒成核生长动力学研究
Nucleation and Growth Kinetics for Si Nano-crystallites Prepared by Pulsed Laser Ablation under Different Energy Density
摘要
Abstract
A series Si nano-crystallites films were deposited on the substrates by pulsed laser ablation in Ar gas with fixed pressure of 10 Pa at room temperature through changing laser energy density, and the substrates were placed under the ablation spot and paralleled to the plume axis. The prepared Si nano-crystallites was charaterized by Scaning Electron Microscope (SEM) , Raman ( Raman) scattering spectra and X-ray Diffraction ( XRD) . The results indicated that the position of nano-crystallites deposited on the substrates in an area from target, and the size increased first, and then decreased as the distance from target increasing. As the laser energy density increasing, the position distribution of Si nanoparticles became broader bidirectional, that is, as the disappear position backward shifted, the initial position of nanoparticles appeared on substrates moved toward ablated spot at the same time. The maximum size of nanoparticles deposited on substrate did not change obviously, furthermore, the corresponding depositposition backward shifted. Combining with hydrodynamics model, nucleation division model andthermokinetic equation, the dynamics of nucleation and growth of nanoparticles were analyzed bysimulating the dynamics process of laser ablated target.关键词
脉冲激光烧蚀/Si纳米晶粒/能量密度/成核生长动力学Key words
pulsed laser ablation/ Si nano-crystallites/ laser energy density/ dynamics of nucleation and growth分类
通用工业技术引用本文复制引用
邓泽超,罗青山,胡自强,丁学成,褚立志,梁伟华,陈金忠,傅广生,王英龙..不同能量密度下脉冲激光烧蚀制备纳米Si晶粒成核生长动力学研究[J].人工晶体学报,2011,40(6):1547-1551,5.基金项目
973计划前期研究专项(2011CB612305) （2011CB612305）
河北省自然科学基金(E2008000631,E2011201134) （E2008000631,E2011201134）
河北省教育厅基金(2009308)资助课题 （2009308）
