人工晶体学报2011，Vol.40Issue(6)：1552-1556,5.
Pb过量对以Ti-Al为阻挡层的硅基铁电电容器极化翻转性能的影响
Effect of Lead Excess on Polarization Switching Properties of Si-based Ferroelectric Capacitor with Ti-Al Barrier Layer
摘要
Abstract
Pt/La0.5 Sr0 5 Co03 (LSCO ) /Pb (Zr0 4 Ti0 6) O3 (PZT) /LSCO/Ti-Al/Si heterostructure has been fabricated, in which the sputtered LSCO films were used as the electrodes of the LSCO/PZT/LSCO capacitor, PZT films were prepared by sol-gel technique using different excess lead, and using Ti-Al as a conducting barrier layer. The effect of lead excess on the swithching properties of the LSCO/PZT/LSCO capacitor has been investigated. The results indicated that lead excess has great impact on the switching properties of the capacitors, and the stoichiometric Pb( Zr0.4Ti0.6) O3 film, annealed in a conventional annealing furnace at 550℃ for 1 h, could yield the best switching properties, which corresponds to 15% lead excess in the precursor. The coercive voltage and remnant polarization of the LSCO/PZT/LSCO capacitor were 1.25 V and 24.6 μC/cm2, respectively, measured at the voltage of 5 V. Moreover, it is found that the LSCO/PZT/LSCO capacitor is fatigue free up to 109 switching cycles, and the resistivity ofthe capacitor decreases with the increase of lead excess of the precursor.关键词
Pb过量/铁电电容器/PZT/极化翻转/溶胶-凝胶Key words
lead excess/ ferroelectric capacitor/ PZT/ polarization flip/ sol-gel分类
化学化工引用本文复制引用
刘卓佳,刘保亭,彭增伟,代秀红,闫会芳,付跃举,赵庆勋..Pb过量对以Ti-Al为阻挡层的硅基铁电电容器极化翻转性能的影响[J].人工晶体学报,2011,40(6):1552-1556,5.基金项目
国家自然科学基金(60876055,11074063)资助项目 （60876055,11074063）
河北省应用基础研究计划重点项目(10963525D) （10963525D）
高等学校博士点基金(20091301110002) （20091301110002）
