人工晶体学报2011，Vol.40Issue(6)：1591-1594,4.
AIT玻璃衬底非晶硅薄膜的固相晶化研究
Solid Phase Crystallization of Amorphous Silicon Prepared on AIT Glass
摘要
Abstract
Solid phase crystallization ( SPC ) of amorphous Silicon ( a-Si) films prepared on aluminum-Induced textured (AIT) glass was studied. The structure and optical properties of films were studied by virtue of Raman scattering spectra and X-ray diffraction. The results show that the crystalline volume fraction on AIT glass has reached above 80% by rapid-thermal process after 10 h, and it has a better light trapping effect compared with the films prepared on planar glass.关键词
铝诱导织构/固相晶化/多晶硅薄膜/陷光作用Key words
aluminum induced texture/ solid phase crystallization/ multicrystalline silicon/ light trapping effect分类
数理科学引用本文复制引用
郑文,陈永生,卢景霄..AIT玻璃衬底非晶硅薄膜的固相晶化研究[J].人工晶体学报,2011,40(6):1591-1594,4.基金项目
滨州学院青年人才创新工程项目(BzxYQN2G200828) （BzxYQN2G200828）
