武汉工程大学学报2011，Vol.33Issue(10)：68-72,5.DOI:10.3969/j.issn.1674-2869.2011.10.016
应用于半导体器件的掺杂纳米金刚石膜
Semiconductor application of doped nano-crystalline diamond film
摘要
Abstract
Diamond film is an ideal semiconductor material due to its excellent properties, such as high thermal conductivity, wide band gap, high dielectric breakdown field and good carrier mobility. This paper describes the advantages of the doped diamond films as the working layer in semiconductor devices,and presents a comprehensive review of research status in diamond about p and n doping. The factors that influence the growth of Nano-crystalline diamond films are also discussed. The trends of the diamond film applications in semiconductor devices are investigated and the application potential is . Prospected.关键词
纳米金刚石膜/半导体器件/掺杂Key words
nano-crystalline diamond film/semiconductors/doping分类
化学化工引用本文复制引用
苏含,汪建华,熊礼威,刘鹏飞,江川..应用于半导体器件的掺杂纳米金刚石膜[J].武汉工程大学学报,2011,33(10):68-72,5.基金项目
国家自然科学基金资助项目(11175137). （11175137）
