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薄膜SOI上SiGe HBT集电结耗尽电荷和电容改进模型

徐小波 张鹤鸣 胡辉勇

物理学报2011,Vol.60Issue(11):730-734,5.
物理学报2011,Vol.60Issue(11):730-734,5.

薄膜SOI上SiGe HBT集电结耗尽电荷和电容改进模型

Improved base-collector depletion charge and capacitance model for SiGe HBT on thin-film SOI

徐小波 1张鹤鸣 1胡辉勇1

作者信息

  • 1. 西安电子科技大学微电子学院,宽禁带半导体材料与器件重点实验室,西安710071
  • 折叠

摘要

Abstract

The SiGe heterojunction bipolar transistor (HBT) on thin film SOI is successfully integrated with SOI CMOS by "folded collector".This paper deals with the collector depletion charge and the capacitance of this structure.An optimized model is presented based on our previous research.The results show that the charge model is smoother,and that the capacitance model with considering different current flow areas,is vertical and horizontal depletion capacitances in series,showing that the depletion capacitance is smaller than that of a bulk HBT.The charge and capacitance vary with the increase of reverse collector-base bias.This collector depletion charge and capacitance model provides valuable reference to the SOI SiGe HBT electrical parameters design and simulation such as Early voltage and transit frequency in the latest 0.13μm SOI BiCMOS technology.

关键词

耗尽电容/SiGe/HBT/SOI

Key words

depletion capacitance/SiGe HBT/SOI

分类

信息技术与安全科学

引用本文复制引用

徐小波,张鹤鸣,胡辉勇..薄膜SOI上SiGe HBT集电结耗尽电荷和电容改进模型[J].物理学报,2011,60(11):730-734,5.

基金项目

国家部委资助项目 ()

中央高校基本科研业务费 ()

陕西省自然科学基础研究计划(批准号:2010JQ8008)资助的课题 ()

物理学报

OA北大核心CSCDCSTPCD

1000-3290

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