物理学报2011，Vol.60Issue(12)：433-437,5.
脉冲激光烧蚀制备纳米Si晶粒成核气压阈值及动力学研究
Pressure threshold and dynamics of nucleation for Si nano-crystal grains prepared by pulsed laser ablation
摘要
Abstract
Si nano-crystal grains are prepared by pulsed laser ablation in low pressure Ar at room temperature through changing the gas pressure and the distance between target and substrate.The morphologies and compositions of samples are characterized by scanning electron microscopy images,Raman scattering spectra and X-ray diffraction spectra.The pressure threshold for Si grain formation is obtained to be 0.6 Pa at a laser fluence of 4 J/cm2,distance between target and substarate of 3 cm,and room temperature.Combining the fluid mechanics model and the nucleation division model,the dynamics process of nucleation is analyzed.The Monte Carlo simulation shows that the nucleation of nano-crystal grains is determined jointly by temperature and supersaturated density.关键词
脉冲激光烧蚀/成核/气压阈值/Monte/Carlo数值模拟Key words
pulsed laser ablation/nucleation/pressure threshold/Monte Carlo simulation分类
数理科学引用本文复制引用
邓泽超,罗青山,丁学成,褚立志,梁伟华,陈金忠,傅广生,王英龙..脉冲激光烧蚀制备纳米Si晶粒成核气压阈值及动力学研究[J].物理学报,2011,60(12):433-437,5.基金项目
国家重点基础研究发展计划前期专项基金 （）
国家自然科学基金 （）
河北省自然科学基金 （）
河北省教育厅科研基金（批准号：2009308）资助的课题 （）
