物理学报2012，Vol.61Issue(1)：310-317,8.
铜沉淀对直拉硅单晶中洁净区形成的影响
Effect of copper precipitation on the formation of denuded zone in Czchralski silicon
摘要
Abstract
The influence of copper precipitation on the formation of denuded zone（DZ） in Czochralski silicon has been systematically investigated by means of optical microscopy.It was found that,for conventional furnace high-low-high annealing,the copper precipitates colonies generated along the whole crosssection in the specimens contaminated by copper impurity at the first step of the heat treatment, thus no DZ generated.While in other specimens,DZ formed.Additionally,it was found that the contamination temperature can influence significantly the thermodynamics and kinetic process of the formation of copper precipitates.The phenomena also occurred in the specimens underwent rapid thermal-low-high annealing.On the basis of the step by step investigation,it was revealed that the copper precipitates temperature and point defects type can influence the formation of DZ to a great extent.关键词
直拉单晶硅/铜沉淀/洁净区Key words
Czchralski silicon/copper precipitation/denuded zone分类
化学化工引用本文复制引用
王永志,徐进,王娜婷,吉川,张光超..铜沉淀对直拉硅单晶中洁净区形成的影响[J].物理学报,2012,61(1):310-317,8.基金项目
国家自然科学基金（批准号：50902116 （）
50832006） （）
福建省高等学校新世纪优秀人才支持计划,硅材料国家重点实验室开放基金项目 （）
福建省重大平台建设基金（批准号：2009J1009）资助的课题~~ （）
