物理学报2012，Vol.61Issue(3)：517-524,8.
基于纳米孔阵列增透膜的光伏器件特性分析及实验研究
Characteristics of the photovoltaic device with nanohole array antireflection coating layer
摘要
Abstract
The optical characteristic of the nanohole array film is analyzed by using rigorous coupled wave,and the nanohole array film is proposed to serve as photovoltaic device anti-reflection film to improve the device absorption and efficiency.According to theoretical analysis,nanohole array anti-reflection film has a better anti-reflection effect than the monofilm and can better enhance the photovoltaic device＇s efficiency,especially in a speetral range of 400 nm-600 nm;the optimal period of the nanohole array is 500 nm,the optimal filling factor of the nanohole array is 0.2 and the optimal thickness of the nanohole array is 110 nm.In order to testify the optical effect of nanohole array,the nanohole arrays of different sizes are made by the micro-nano processing technology in the anti-reflection film of theφ200μm Si Detector,and a relevant experimental system is set up.With the optimized nanohole arrays,the short circuit currents of the experimental sample are increased～6%in a 400—1100 nm spectral range,especially,increased～15%in a 400 nm—600 nm spectral range.关键词
纳米孔阵列/严格耦合波理论/增透膜/光伏器件Key words
nanohole arrays/photovoltaic device/rigorous coupled wave分类
数理科学引用本文复制引用
王宁,朱永,韦玮,陈建君,李平,文玉梅..基于纳米孔阵列增透膜的光伏器件特性分析及实验研究[J].物理学报,2012,61(3):517-524,8.基金项目
国家自然科学基金重点项目（批准号：50830202）和国家自然科学基金（批准号：60707010）资助的课题 （）
