摘要
Abstract
In recent years,the MEMS Mass Spectrometry that is small,low-powered,cheap and easy-used is the focus for the field of mass spectrometry and becomes hot.MEMS MS and its related research has scored some great successes which even some complete MEMS MSs has been reported.The performance of MEMS MS which has been reported is poor,and the research of MEMS MS is focus on the miniaturization of its components,such as MEMS ESI,MEMS Ion trap and MEMS Faraday Cup.This review summarizes the latest achievements in the field of MEMS MS and analyzes the difficulties of the research.关键词
MEMS/质谱仪/离子源/质量分析器/离子检测器Key words
MEMS/Mass Spectrometry/Ionizer/Mass Analyzer/Detector分类
机械制造
