中国机械工程2011，Vol.22Issue(22)：2757-2761,5.
TiAlN／SiO2纳米多层刀具涂层的微观结构和超硬效应研究
Investigation of Microstructure and Superhardness Effect of TiAIN/Si02 Tool Nanomultilayers
摘要
Abstract
A series of TiAlN/SiO2 nanomultilayers with various SiO2 layer thicknesses were synthesized by reactive magnetron sputtering. The microstructure and mechanical properties were evaluated by X-ray diffraction （XRD）, scanning electron microscopy（SEM）, high-resolution transmission electron microscopy（HRTEM） and nano-indentation. The results reveal that, under the template effect of TiALN layers, amorphous SiO2 is forced to crystallize and grow epitaxially with TiALN layers when SiO2 layer thickness is below lnm, and the nanomultilayer appears superhardness effect with the maximum hardness and elastic modulus of 37GPa and 393GPa when SiO2 layer thickness is 0.6nm. As the SiO2 layer thickness exceedes lnm, SiOz transforms into amorphous state and breaks the coherent growth of multilayers, resulting in the decrease of hardness and elastic modulus. Therefore cutter protective coatings which possess better mechanical properties and good oxidation resistance at high temperature are synthesized by this mechanism to meet modern cutting.关键词
超硬效应/TiAlN／SiO。纳米多层涂层/共格外延生长/非晶晶化Key words
superhardness effect/TiAlN/Si02 nanomultilayer/epitaxial growth/amorphous crystallization分类
矿业与冶金引用本文复制引用
王均涛,刘平,杨丽红,李伟,刘新宽,马凤仓..TiAlN／SiO2纳米多层刀具涂层的微观结构和超硬效应研究[J].中国机械工程,2011,22(22):2757-2761,5.基金项目
上海市科学技术委员会资助项目（08110511600) （）
上海市教育委员会重点学科建设项目（J50503) （）
