中国机械工程2012，Vol.23Issue(2)：208-211,4.
单晶硅电火花铣削电极表面覆盖效应研究
Study on Electrode Covering Effect on Monocrystalline Silicon in Electrical Discharge Milling
摘要
Abstract
Electrode covering effect on monocrystalline silicon in electrical discharge milling was analyzed and the covering material was SiO2. The SiO2 cover was proved to be generated from some electrochemical reactions during the process. The effects of electrical parameters on the covering thickness were researched, and electrical discharge milling of low or even no electrode wear can be realized by controlling the covering thickness to compensate for electrode wear.关键词
单晶硅/电火花铣削/电极损耗/覆盖效应Key words
monocrystalline silicon/electrical discharge milling/electrode wear/covering effect分类
矿业与冶金引用本文复制引用
刘志东,鲁清,邱明波,田宗军,黄因慧..单晶硅电火花铣削电极表面覆盖效应研究[J].中国机械工程,2012,23(2):208-211,4.基金项目
国家自然科学基金资助项目(50975142) （50975142）
江苏省科技支撑计划资助项目(BE200916I),江苏省博士后基金资助项目(1002009C) （BE200916I）
