中南民族大学学报：自然科学版2011，Vol.30Issue(3)：34-37,4.
溅射时间对掺镓氧化锌透明导电薄膜特性的影响
Effects of Sputtering Time on Structural,Optical and Electrical Properties of Gallium-Doped Zinc Oxide Films
摘要
Abstract
Gallium-doped zinc oxide（GZO） thin films were deposited with various sputtering time by Radio Frequency（RF） magnetron sputtering method.The structural,optical and electrical properties of GZO films were investigated by X-ray diffraction（XRD）,spectrophotometer and four-probe meter,respectively.The results show that all the obtained films are polycrystalline with a hexagonal wurtzite structure and grow preferentially in the（002） direction,the average transmittance is higher than 87.97 % in the visible light range.The structural,optical and electrical properties of the GZO films are closely related to the sputtering time.The highest（002） peak intensity and the lowest resistivity（1.05×10-3Ω·cm） of GZO films are achieved when the sputtering time is 25 min.关键词
掺镓氧化锌/透明导电薄膜/光电特性Key words
gallium-doped zinc oxide/transparent conductive films/optical and electrical properties分类
动力与电气工程引用本文复制引用
钟志有,周金,杨玲玲..溅射时间对掺镓氧化锌透明导电薄膜特性的影响[J].中南民族大学学报：自然科学版,2011,30(3):34-37,4.基金项目
湖北省自然科学基金资助项目(2009CDB166) （2009CDB166）
中央高校基本科研业务费专项资金项目资助(CZZ11001) （CZZ11001）
中南民族大学研究生创新基金资助项目(chxxyz110107) （chxxyz110107）
