人工晶体学报2012，Vol.41Issue(1)：20-23,4.
硫化时间对CuInS2薄膜微结构的影响
Effects of Sulfurization Time on Microstructure of CuInS2 Films
摘要
Abstract
Copper indium disulfide thin films were prepared on Mo-coated glass substrates by sulfurization treatment in N2 atmosphere of the Cu-In metallic precursors deposited by magnetron sputtering. The effects of sulfurization time on the surface morphology and microstructures of the resulting thin films were investigated. The microstructures of CuInS2 absorber films were characterized by field emission scanning electron microscopy ( FE-SEM), X-ray diffraction ( XRD) and Raman spectror-copy. The results indicated that with proper sulfurization time the resulting CuInS2 thin films have chalcopyrite structure, the grains morphology evolves from spherical structure into sheet structure, the crystallinity of the CuInS2 films gets better with the increase of sulfurization time. However, the Cu-Au phase occurs in the films treated for too long time, making the films quality worse.关键词
磁控溅射/CuInS2薄膜/固态源硫化法/微观结构Key words
magnetron sputtering/CuInS2 thin film/solid-state sulfurization/microstructure分类
数理科学引用本文复制引用
夏冬林,徐俊,刘俊,雷盼..硫化时间对CuInS2薄膜微结构的影响[J].人工晶体学报,2012,41(1):20-23,4.基金项目
国家自然科学基金重点项目(No.51032005) （No.51032005）
材料复合新技术国家重点实验室(武汉理工大学)开放基金 （武汉理工大学）
