人工晶体学报2012，Vol.41Issue(1)：177-182,6.
反应磁控溅射制备AZO薄膜相结构的演化及机理研究
Evolution Mechanisim of Microstructure of AZO Thin Films Prepared by Reactive Magnetron Sputtering
摘要
Abstract
ZnO: Al (AZO) thin films were grown by reactive DC magnetron sputtering technique under various oxygen flow ratio at room temperature. The effect of oxygen flow on phase, morphology and structure of the deposited films were systematically analyzed by XRD, SEM and TEM, respectively. The thin films deposited under 2.5 sccm O2 flows show AZO/Zn( AZO) bilayers structure. As the oxygen flow is 3.5 sccm, the AZO thin films with good visible transparency and low resistivity exhibited the c-axis (002) oriented polycrystalline films. As the oxygen flow is 5.0 sccm, Al2O3 nanoparticles were formed in AZO films with visible transparency and high resistivity and disappeared after annealing at 400 ℃.关键词
直流反应磁控溅射/AZO薄膜/Al2 O3纳米颗粒Key words
reactive DC magnetron sputtering/AZO film/A12O3 nanoparticles分类
数理科学引用本文复制引用
赵志明,丁宇,田亚萍,张晓静,马二云,白力静,蒋百灵..反应磁控溅射制备AZO薄膜相结构的演化及机理研究[J].人工晶体学报,2012,41(1):177-182,6.基金项目
陕西省自然科学基金资助项目(2010JQ6008) （2010JQ6008）
陕西省科学研究计划(21080209JK608) （21080209JK608）
陕西省重点学科建设专项资金资助项目 （）
