岩矿测试2012，Vol.31Issue(1)：132-137,6.
铬天青S光度法及非线性拟合测定高纯硅中微量铝
Determination of Trace Aluminum in High-purity Silicon with Chrome Azurol S Spectrophotometry by Nonlinear Fitting
摘要
Abstract
Spectrophotometry with chrome azurol S is one of the methods used to determine aluminum content in silicon. Since the standard curve is linear but does not pass through the origin, it leads to a large measurement error with low aluminum content. In order to improve the accuracy and decrease the detection limit, the spectrophotometric aluminum standard curve was analyzed in the low Al content part and the effect of different models on the data accuracy is discussed in this paper. Results indicate the absorbance of aluminum standard solution at 0 -0. 3 μg/mL did not match with the linear relation, while the function of y = 17.45230χ3 + 10.42883 χ2 + 1. 04047χ (y for absorbance deduct blank, x for aluminum concentration) yielded good results where R2 reached 0. 99975. This formula was evaluated by the certified aluminum content in different volume polysilicon solutions. The relative standard deviation is 2. 55%. The result matches the one obtained by the inductively coupled plasma atomic emission spectroscopy method. This method can improve the measurement accuracy of low content aluminum in polysilicon when the content of aluminum is greater than 0.55 μg/g.关键词
高纯硅/铝/铬天青S光度法/标准曲线/函数拟合Key words
high-purity silicon/ aluminum/ chrome azurol S spectrophotometry/ standard curve/ function fitting分类
化学化工引用本文复制引用
傅翠梨,卢成浩,张蓉,黄平平,吴浩,罗学涛,李锦堂..铬天青S光度法及非线性拟合测定高纯硅中微量铝[J].岩矿测试,2012,31(1):132-137,6.基金项目
福建省自然科学基金项目(2010J05120) （2010J05120）
