表面技术2012，Vol.41Issue(2)：47-49,78,4.
磁控溅射ZrN薄膜厚度对其色度的影响
Effect of Film Thickness on the Color of Magnetron Sputtering ZrN Films
摘要
Abstract
The ZrN film was prepared on the mirror stainless steel plate by using unbalanced magnetron sputtering technique. The thickness of ZrN films was controlled by changing the coating time. The L" , a* ,b" values of the ZrN thin films with different thickness was measurea with X-rate colorimeter. The curve about the L" ,a" ,b" values of the ZrN thin films with different thickness was draw out. The color variation of the magnetron sputtering ZrN films effected by the film thickness is obtained: when film thickness is less than about 63. 7 nm, with the film thickness increasing, the L" ,a* values do not change, b' values are increase by linear, and the color of the film become gold gradually; when film thickness is over about 63. 7 nm, with the film thickness increasing, the chromaticity coordinates of the film has no significant change, and the color is stable gold.关键词
沉积速率/膜层厚度/ZrN薄膜/色度Key words
deposition rate/ film thickness/ ZrN film/ color分类
矿业与冶金引用本文复制引用
孙维连,安广,孙铂,王会强,李新领..磁控溅射ZrN薄膜厚度对其色度的影响[J].表面技术,2012,41(2):47-49,78,4.基金项目
河北省自然科学基金(E2009000646) （E2009000646）
