传感技术学报2012，Vol.25Issue(3)：338-343,6.DOI:10.3969/j.issn.1004-1699.2012.03.012
非线性微机械谐振器的频率跟踪控制及数值仿真
Resonance Frequency Tracking Control for Nonlinear MEMS Resonator
摘要
Abstract
The nonlinear principle of the typical MEMS resonator was introduced, according to the phase relatio: between input electrostatic force and output displacement, phase-locked loop technology was adopted for resonator The control equations based on phase-locked technology were also built for the system. With the help of th averaging method,the system stability was analyzed and the equilibrium for the amplitude vibration was achieved The theoretical analysis and simulation show the integral gain is critical to the system stability. When it larger tha the critical value, the system stable time is less, but the frequency tracking process would fluctuate; if it smaller tha the critical point,the system stable time is longer,but the frequency tracking process would un-fluctuating.关键词
微机械电子系统/谐振器/非线性/锁相技术/平均周期法Key words
micro-electromechanical systems/resonator/nonlinear/phase-locked technology/averaging method分类
信息技术与安全科学引用本文复制引用
刘恒,孟瑞丽..非线性微机械谐振器的频率跟踪控制及数值仿真[J].传感技术学报,2012,25(3):338-343,6.基金项目
公益性行业(气象)科研专项(GYHY200906037) （气象）
国家自然科学基金项目(41075026) （41075026）
南京信息工程大学科研基金(S8111065001) （S8111065001）
