传感技术学报2012，Vol.25Issue(4)：448-452,5.DOI:10.3969/j.issn.1004-1699.2012.04.006
一种MEMS同振柱型仿生矢量水听器的研制
Research of the MEMS Resonant-Column Type Bionic Vector Hydrophone
摘要
Abstract
A Resonant-column Type Vector Hydrophone based on MEMS technology and bionic principle was presented, which consists of two-dimensional bionic hydrophone and pressure hydrophone. Based on acoustic theory, the design and manufacture of the vector hydrophone are described in detail. In order to verify the function of the hydrophone, preliminary characterization tests of the hydrophone were performed in National Defense Underwater A-coustics Calibration Laboratory of China. Results show that working frequency band is 0 - 3 kHz; x-channel sensitivity is -177.9 dB(2 kHz) , y-channel sensitivity is -175.4 dB(2 kHz), pressure channel sensitivity is -175.8 dB(2 kHz). And the Resonant-column Type Bionic Vector hydrophone not only possesses a good "8" directional pattern but also can withstand a 3 Mpa pressure. The application of this novel MEMS Resonant-column Type Bionic Vector Hydrophone is broad,included from civil ships' evading bonds,fishery to hydrospace detection.关键词
MEMS/同振柱型/仿生/矢量水听器Key words
MEMS/re9onant-column type/bionic/vector hydrophone分类
通用工业技术引用本文复制引用
刘林仙,张国军,许姣,张文栋,薛晨阳,葛晓洋,张慧..一种MEMS同振柱型仿生矢量水听器的研制[J].传感技术学报,2012,25(4):448-452,5.基金项目
国家863计划项目(2011AA040404) （2011AA040404）
