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硅压阻传感器的智能温度补偿研究

胡辽林 刘晨 盖广洪

传感技术学报2012,Vol.25Issue(4):468-471,4.
传感技术学报2012,Vol.25Issue(4):468-471,4.DOI:10.3969/j.issn.1004-1699.2012.04.010

硅压阻传感器的智能温度补偿研究

Silicon Piezoresistive Sensor's Intelligent Temperature Compensation

胡辽林 1刘晨 1盖广洪2

作者信息

  • 1. 西安理工大学机械与精密仪器工程学院,西安710048
  • 2. 中国航天科技集团公司第44研究所,西安710025
  • 折叠

摘要

Abstract

For silicon piezoresistive sensor's temperature drift problem,an intelligent temperature compensation system was designed by adopting MAX 1452 signal conditioning chip. The system includes hardware and software and it can compensate 8 sensors once a time. The system performance tests of pre-compensation and post-compensation are made under different temperature and different pressure. The results show that the designed system is reliable,sensor's error from temperature is reduced obviously after compensation and the precision is achieved within 0.2%.

关键词

硅压阻传感器/温度漂移/智能补偿/MAX1452

Key words

piezoresistive sensor/ temperature drift/ intelligent compensation /MAX1452

分类

信息技术与安全科学

引用本文复制引用

胡辽林,刘晨,盖广洪..硅压阻传感器的智能温度补偿研究[J].传感技术学报,2012,25(4):468-471,4.

基金项目

陕西省教育厅科学研究计划项目(2010JK716) (2010JK716)

传感技术学报

OA北大核心CSCDCSTPCD

1004-1699

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