传感技术学报2012，Vol.25Issue(5)：604-608,5.DOI:10.3969/j.issn.1004-1699.2012.05.010
纳米三坐标测量机模拟接触式探头的标定
Calibration of an Analogue Contact Probe for Nano-Coordinate Measurement Machines(CMM)
摘要
Abstract
High-precision analogue contact probe for Micro/Nano-Coordinate Measurement Machines (CMM)requires modeling and calibration parameters when calculating the displacement of the ball tip with respect to the sensors' output.This paper presents the transformation model which is based on the self-developed analogue contact probe,and the probe is composed of a fiber stylus with ball tip,a mechanism with wire-suspended floating plate,a two-dimensional angle sensor and a miniature Michelson interferometer.Trough space coordinate transformation,the matrix computational model and the calibration experiment,the emphasis is upon the description of the specific calibration method and the calibration of unknown parameters.The calibration experiment results show that the standard deviation of the error between calibration values and actual values in x,y,z axes are bellow 30nm,and the feasibility and effectiveness of the calibration method have been proved by the experiment.关键词
模拟探头/DVD激光读取头/标定/纳米三坐标测量机Key words
analogue probe/DVD pick-up head/calibration/micro/nano-coordinate measurement machine分类
信息技术与安全科学引用本文复制引用
钱剑钊,黄强先,李瑞君,龚伟,王志伟,王晨晨..纳米三坐标测量机模拟接触式探头的标定[J].传感技术学报,2012,25(5):604-608,5.基金项目
国家高技术研究发展计划(863计划)No.2008AA042409 （863计划）
国家自然科学基金Nos.50875073与Nos.50975075 （）
