材料科学与工程学报2012，Vol.30Issue(1)：14-16,3.
ITO透明导电薄膜厚度与光电性能的关系
Relationship between Optical/Electrical Properties and the Thickness of the ITO Films
摘要
Abstract
The optical and electrical properties of thin film were influenced by the thickness.The thickness of the indium-tin-oxides（ITO） films range from 200nm to 1500nm were deposited by magnetron sputtering.The relationship between thickness and color,optical transmittance,sheet resistance was investigated.The color of thin film was changed by increasing the thickness.The optical transmittance dropped oscillation by increase of the thickness,and has maximum value（mauve color）,the trend of oscillation conform to multi-beam interference condition.The square resistance of the film was reduced by increasing the film thickness.When the thickness of the thin film is 1387nm,the sheet resistance is 1.3Ω/□ and the minimum electrical resistivity is 1.8×10-4Ω·cm.This study showed that the optical transmittance and square resistance were controlled by the thickness of the thin film.关键词
ITO/可见光透过率/面电阻/透明导电氧化物Key words
ITO film/transmittance/square resistance/transparent conducting oxide分类
数理科学引用本文复制引用
吴云龙,成惠峰,余刚,王永斌,韩磊,付静..ITO透明导电薄膜厚度与光电性能的关系[J].材料科学与工程学报,2012,30(1):14-16,3.基金项目
科研院所技术开发研究资助项目 （）
