东南大学学报（自然科学版）2012，Vol.42Issue(2)：290-294,5.DOI:10.3969/j.issn.1001-0505.2012.02.019
硅微陀螺仪零偏温度性能补控方法设计
ZRO temperature dependency compensating-control design of micro-gyro
摘要
Abstract
First, the relations between temperature and the resonant frequency, quality factor, sensing signal output, and mechanical thermal noise of silicon micro-gyro are theoretically deduced to further demonstrate that the effect on ZRO (zero rate output) of micro-gyro is a combined result of these nonlinear factors. Then, through partial temperature dependency test, the relationship curves of the resonant frequency and quality factor over temperature in two modes are derived. Finally, according to the real ZRO measurements, the polynominal term fitting method is presented and then the hybrid method combined with constant temperature control is intensively investigated to better the conforming compensation effect, which can make sure that the wafer die and circuitry are immune to the ambient temperature. The experimental results demonstrate that the temperature compensation and control system designed can effectively improve the zero bias stability of the micro-gyro.关键词
硅微陀螺仪/零偏输出/温度补偿/温度控制Key words
silicon micro-gyro/ ZRO (zero rate output) / temperature compensation/ temperature control分类
信息技术与安全科学引用本文复制引用
夏敦柱,王寿荣,周百令..硅微陀螺仪零偏温度性能补控方法设计[J].东南大学学报（自然科学版）,2012,42(2):290-294,5.基金项目
国家高技术研究发展计划(863计划)资助项目(2002AA812038)、国家自然科学基金资助项目(61001048,60974116). （863计划）
