电子科技大学学报2012，Vol.41Issue(2)：238-241,304,5.DOI:10.3969/j.issn.1001-0548.2012.02.013
亚表面杂质对熔石英激光损伤的影响
Distribution of Inclusions in Fused Silica Sub-Surface and Its Influence on Laser-Induced Damage
摘要
Abstract
Fused silica with different etching time were obtained by HF acid etching. The variation and distribution of inclusions were analyzed by synchrotron X-ray fluorescence spectrometry. The relative concentrations of main inclusions, such as Fe, Cu and Ce, are decreased with the increase of etching time. The AFM and Wyko images of the samples show that the surface roughness increase with the increase of etching time. The R:l test procedure has been adapted to the pre-etching samples. The laser induced damage threshold (LIDT) increases within 30 min etching time and rapidly decreases to the threshold of non-etching fused silica level. The result indicates that Cu, Ce concentrations plays important role at low etching time, whereas when etching time is too long, the decreased LIDT is attributed to the increment of surface roughness.关键词
熔石英/HF酸刻蚀/激光损伤/X射线荧光成像方法Key words
fused silica/ HF acid etching/ laser induced damage/ SXRF分类
数理科学引用本文复制引用
蒋晓东,郑直,祖小涛,李春宏,周信达,黄进,郑万国..亚表面杂质对熔石英激光损伤的影响[J].电子科技大学学报,2012,41(2):238-241,304,5.基金项目
国家自然科学基金(61178018) （61178018）
