光学精密工程2012，Vol.20Issue(4)：719-726,8.DOI:10.3788/OPE.20122004.0719
数控非接触式超光滑光学元件加工机床的设计
Design of CNC non-contact super-smooth polishing machine for optical components
摘要
Abstract
A Computer Numerical Control (CNC) non-contact super-smooth polishing method for optical components was proposed. Polishing fluid was provided through a center hole of the polishing tool for the optical surface and it interacted with the surfaces of optical components drived by a rotated polishing tool to remove the materials on the optical components minutely. The motion trajectory of the polishing tool could be controlled by the computer. According to the proposed principle, a prototype of CNC non-contact super-smooth polishing machine for the optical components was designed and developed, and its minimum feed rate and positioning accuracy for the linear motion axis are 0. 0001 m/s and 0. 008 mm, respectively; the minimum rotate speed and positioning accuracy for the swing shaft are 0. 0028 r/min and 15', respectively. The performance of the prototype could meet the requirements of spherical/aspherical optical components with diameters less than 200 mm for super-smooth polishing. To verify the prototype, an experiment was performed on a fused silica component. After super-smooth polishing for 20 min, the surface roughness of two points on the optical component isimproved from 1. 03 nm and 0. 92 nm to 0. 48 nm and 0. 44 nm, which shows the polishing accuracy has been optimized greatly.关键词
光学制造/非球面/非接触加工/超光滑抛光/液体抛光/加工机床Key words
optical fabrication/aspheric surface/non-contact fabrication/super-smoothing polishing/liquid polishing/polishing machine分类
化学化工引用本文复制引用
李显凌..数控非接触式超光滑光学元件加工机床的设计[J].光学精密工程,2012,20(4):719-726,8.基金项目
国家科技重大专项资助项目(No.2009ZX02205) （No.2009ZX02205）
