光学精密工程2012，Vol.20Issue(4)：727-732,6.DOI:10.3788/OPE.20122004.0727
接触式大型非球面镜面形测量中测量点分布的确定
Determination of measurement point distribution for contact measurement of large aspheric mirror surface
摘要
Abstract
Measurement point distribution in contact measuring large aspheric optical surface was researched. By the radial and uniform measurement points with different density distributions, various surface deviations represented by different Zernike polynomials were sampled respectively. Then, the maximum PV and RMS errors were calculated and analyzed. Measurement results of a 1. 8 m parabolic mirror were taken as examples, and it indicates that the low density radial measurement point distribution can meet the measurement needs at the forming and coarse grinding stages because the surface deviations show large rotate-symmetrical forms. Moreover, the uniform distribution of measurement points is an effective way to improve measurement accuracy at fine grinding and initial polishing stages, for the main surface deviations are astigmatism or other asymmetrical aberrations. This method can guide the measurement point distribution, control the measurement error caused by distribution to be less than 1/5 of surface error, and can improve measurement accuracy efficiently.关键词
光学面形检测/非球面/接触式测量/测量误差/Zernike多项式Key words
optical surface testing/aspheric surface/contact measurement/measurement error/Zernike polynomial分类
化学化工引用本文复制引用
李杰,伍凡,吴时彬,匡龙,林常青..接触式大型非球面镜面形测量中测量点分布的确定[J].光学精密工程,2012,20(4):727-732,6.基金项目
国家自然科学基金资助项目(No.60838002) （No.60838002）
