航空材料学报2011，Vol.31Issue(z1)：135-139,5.
靶基距对SiC纤维表面钛合金涂层微结构和生长的影响
Effect of Distance Between Target and Substrate on Growth and Microstructure for Titanium Alloy Coatings onto SiC Fiber
黄浩 1文懋 2陈大明 1李臻熙 1黄旭1
作者信息
- 1. 北京航空材料研究院,北京,100095
- 2. 吉林大学材料科学系,长春,130021
- 折叠
摘要
Abstract
In the course of preparation of titanium matrix composite by fiber-coating method, it is one of the important procedures to deposit titanium alloy onto SiC fiber by direct current magnetron sputtering. The influences of distance between target and substrate on thickness distributing, microstructural evolution and growth mechanism for titanium alloy coatings are explored by surface profiler, X-ray diffraction, and atomic force microscope. The experimental results show that the decrease of distance between target and substrate results in worsening of thickness uniformity, and increment of deposition rate and ions energy, accompanying by transition of growth mode from V-shaped column grains to equiaxed grains. The column grains are generally not single grains, but are composed of smaller more nano-grains.关键词
靶基距/PVD/钛合金Key words
distance between target and substrate/PVD/titanium alloy引用本文复制引用
黄浩,文懋,陈大明,李臻熙,黄旭..靶基距对SiC纤维表面钛合金涂层微结构和生长的影响[J].航空材料学报,2011,31(z1):135-139,5.
