黑龙江八一农垦大学学报2012，Vol.24Issue(2)：16-19,26,5.
磁控溅射法制备耐冲蚀钛合金复合涂层研究进展
Recent Studies on Erosion Resistance Titanium Alloy Composite Coatings by Magnetron Sputtering Method
摘要
Abstract
In this paper,the basic concept of magnetron sputtering method was reviewed and several typical magnetron sputtering technology such as reactive magnetron sputtering,unbalanced magnetron sputtering and plasma enhanced magnetron sputtering was described. Recent progress in research on erosion resistance titanium alloy composite coatings deposited by magnetron sputtering method was summarized.关键词
磁控溅射/耐冲蚀/钛合金Key words
magnetron sputter/erosion resistance/titanium alloy分类
矿业与冶金引用本文复制引用
张燕梁,戈超,张俊秋,贾凡,马荣峰..磁控溅射法制备耐冲蚀钛合金复合涂层研究进展[J].黑龙江八一农垦大学学报,2012,24(2):16-19,26,5.基金项目
国家自然科学基金重点项目 （）
国家973计划前期研究专项（2007CB616913）资助 （）
吉林大学研究生创新基金资助项目（20091015）. （）
