激光技术2012，Vol.36Issue(3)：379-381,3.DOI:10.3969/j.issn.1001-3806.2012.03.024
激光直写制备薄膜铂电阻技术研究
Direct laser writing of thin platinum film resistors
吴波 1吴云峰 1匡艳1
作者信息
- 1. 电子科技大学光电信息学院,成都610054
- 折叠
摘要
Abstract
In order to study the application of laser direct writing technology in the fabrication of thin platinum film resistors, platinum resistors in 2μm thick were manufactured by means of laser direct writing. The fabrication mechanism of thin platinum film resistors was discussed. Taking strip platinum resistors as an example, the effect of the laser parameters on the figures of platinum resistors was studied. A 0. 3717 strip thin platinum film resistor was manufactured under the condition that the optimal laser pulse repetition frequency was 18kHz and the laser scanning speed was 100mm/s. Finally, the resistance of the platinum resistors was tested. The results indicate that the width of platinum resistor increases with the increase of laser pulse frequency and the increase of laser scan frequency independently. The edge of the manufactured resistor is neat and the surface is smooth. The relative deviation of the actual resistance to the theoretical one is only 0. 8%.关键词
激光技术/薄膜铂电阻/激光直写/图形填充/扫描振镜Key words
laser technique/ thin platinum film resistor/ laser direct writing/ graphic fills/ scanning galvanometer分类
信息技术与安全科学引用本文复制引用
吴波,吴云峰,匡艳..激光直写制备薄膜铂电阻技术研究[J].激光技术,2012,36(3):379-381,3.
