理化检验：物理分册2012，Vol.48Issue(2)：91-94,119,5.
一种制备透射电镜截面样品的新方法
A New Method for Preparing Cross-sectional TEM Specimens
杨倩 1黄宛真 2郑遗凡 1胡仙超 2王燕飞2
作者信息
- 1. 浙江工业大学分析测试中心,杭州310014／浙江工业大学化学工程与材料学院,杭州310014
- 2. 浙江工业大学分析测试中心,杭州310014
- 折叠
摘要
Abstract
A new method for preparing cross-sectional TEM specimens was introduced in detail taking a film growing on silicon substrate as an example. First stacking the rectangular slices into block, and then cutting the stacking block with low speed diamond wheel to get thin stacked sheet. Secondly pasting the thin stacked sheet and a silicon slice on an organic glass specimen column at the same time. Thirdly grinding and polishing the specimen, and confirming the thickness of the specimen by observing the color of the silicon slice. Finally taking down the specimen, pasting a brass ring on it, cutting it into a disc and ion milling to complete the specimen preparation. The produced new cross-sectional TEM specimens preparation method could thin down the specimens only by manual grinding to get the thickness which could be ion milling directly. Therefore, this preparation method could not only simplify the preparing process, but also get larger area for TEM observation.关键词
透射电镜/制样方法/截面样品Key words
transmission electron microscope（TEM）/preparaing specimen method/cross-sectional specimem分类
化学化工引用本文复制引用
杨倩,黄宛真,郑遗凡,胡仙超,王燕飞..一种制备透射电镜截面样品的新方法[J].理化检验：物理分册,2012,48(2):91-94,119,5.
