南京工业大学学报（自然科学版）2012，Vol.34Issue(3)：31-35,5.DOI:10.3969/j.issn.1671-7627.2012.03.006
基于MEMS工艺微气体传感器结构与工艺设计
Design of structure and process for micro-gas sensor based on MEMS technology
摘要
Abstract
In order to fill up the deficiency of the complex fabrication process of the traditional stacked type micro-gas sensor, a planar type micro-gas sensor in which Pt electrodes were placed on the same plane was designed. Thermal performance of the sensor was analyzed by the finite element analysis tool ANSYS. The temperature difference on the work area of the gas sensing thin film was about 7 ℃ when power consumption was 15 mW, and the maximum temperature of the sensor reached 300 ℃ when power consumption was 13 mW, Fabrication process of the planar type micro-gas sensor was then proposed based on MEMS technology compatible with sol-gel technology. Only three masks were used in the process,thus it reduced its complexity and improved the yield of the device.关键词
微气体传感器/结构优化/热性能/制造工艺Key words
micro-gas sensor/ structure optimazation/ thermal performance/ fabrication process分类
信息技术与安全科学引用本文复制引用
张子立,殷晨波,朱斌,陶春旻..基于MEMS工艺微气体传感器结构与工艺设计[J].南京工业大学学报（自然科学版）,2012,34(3):31-35,5.基金项目
国家自然科学基金资助项目(50875122) （50875122）
江苏省自然科学基金资助项目(BK2007185) （BK2007185）
江苏省2011年度普通高校研究生科研创新计划资助项目(CXZZ11_0340) （CXZZ11_0340）
