强激光与粒子束2012，Vol.24Issue(6)：1429-1433,5.DOI:10.3788/HPLPB20122406.1429
平面调制靶的正弦波曲面超精密加工与表征
Ultra-precision machining and characterizing of sinusoidal surface of surface perturbation target
黄燕华 1高党忠 1谢军 1童维超 1袁光辉 1马小军1
作者信息
- 1. 中国工程物理研究院激光聚变研究中心,四川绵阳621900
- 折叠
摘要
Abstract
Modulation surfaces with micro-scaled sinusoidal fluctuation were fabricated utilizing ultra-precision turning techniques. Problems concerning key techniques including needle tip diamond tool sharpening and tool centering were solved. The relations between the copper mould surface roughness and main cutting parameters, based on feed rate, depth of cut and spindle speed, were investigated. Sinusoidal surfaces with of 20-150 μm and amplitudes of 0. 2-20 μm were developed, and the dimensional tolerances are iO. 5 μm and i 0. 1 μm, respectively. Atomic force microscope measurement shows that the RMS surface roughness in a 20 μm×20 μm area is less than 10 μm. The profile error was assessed by using, the least squares optimization algorithm. Power spectrum analyses of the developed sinusoidal surfaces demonstrate the precise copy of sinusoidal fluctuation from the copper mould surface to the target.关键词
瑞利-泰勒不稳定性/平面调制靶/超精密车削/功率谱Key words
Rayleigh-Taylor instability/surface perturbation target/ ultra-precision turning/power spectrum分类
数理科学引用本文复制引用
黄燕华,高党忠,谢军,童维超,袁光辉,马小军..平面调制靶的正弦波曲面超精密加工与表征[J].强激光与粒子束,2012,24(6):1429-1433,5.
