物理学报2012，Vol.61Issue(4)：436-441,6.
磁性量子元胞自动机功能阵列的实验研究
Experimental study of magnetic quantum-dot cellular automata function arrays
摘要
Abstract
Magnetic quantum-dot cellular automata（MQCA） function arrays are fabricated by electron beam lithography,thermal evaporation and lift-off technologies at room temperature.The effects of exposure dose and exposure time on MQCA function array patterns with three various spacings are experimentally investigated.The results show that the ideal pattern can only be obtained with 100 pA electron beam current and 0.38 lis exposure time.Magnetic force microscopy measurement on the fabricated inverter structure shows that the array demonstrates correct logic operation,which validates the feasibility of fabrication process for MQCA function arrays. Moreover,defect is observed in the experiments,simulations on the defective array show that missing nanomagnet defect in the array leads to signal inversion error.关键词
纳磁体/电子束光刻/磁力显微图/间距Key words
nanomagnet/electron beam lithography/magnetic force microscopy/spacing分类
信息技术与安全科学引用本文复制引用
杨晓阔,蔡理,王久洪,黄宏图,赵晓辉,李政操,刘保军..磁性量子元胞自动机功能阵列的实验研究[J].物理学报,2012,61(4):436-441,6.基金项目
国家自然科学基金 （）
陕西省自然科学基础研究计划重点项目 （）
空军工程大学研究生科技创新计划项目资助的课题 （）
