物理学报2012，Vol.61Issue(5)：366-371,6.
Ge-Sb-Se硫系薄膜制备及光学特性研究
Study on fabrication and optical properties of Ge-Sb-Se thin films
摘要
Abstract
Several methods of fabricating chalcogenide thin films are introduced. In this paper, thermal evaporation and radio frequency methods are used to fabricate Ge-Sb-Se thin films. The thicknesses and roughnesses of the films are measured by surface profile-meter. The film growth rates are calculated. The component difference between film and target material is tested by X-ray photoelectron spectroscopy. The third-order optical nonlinearity and the transmission spectra of films fabricated by thermal evaporation are inves- tigated using femto-second Z-scan method and spectrophotometer, to obtain the values of nonlinear refraction, nonlinear absorption and thickness of films. The results show that the films fabricated by thermal evaporation have excellent physical structures and optical properties, and possess promising potential applications in integrated optical devices.关键词
硫系玻璃/硫系薄膜/热蒸发法/光学特性Key words
chalcogenide glasses/chalcogenide thin films/thermal evaporation/optical properties分类
数理科学引用本文复制引用
张巍,陈昱,付晶,陈飞飞,沈祥,戴世勋,林常规,徐铁峰..Ge-Sb-Se硫系薄膜制备及光学特性研究[J].物理学报,2012,61(5):366-371,6.基金项目
国家自然科学基金（批准号：60978058,61008041,61107047）、宁波市新型光电功能材料及器件创新团队（批准号：2009821007）、浙江省自然科学基金（批准号：Y4110322）、中国科学院西安光机所瞬态光学与光子技术国家重点实验室开放基金（批准号：SKLST201010）、浙江省教育厅科研计划（批准号：Y201017523,Y200907452）、教育部新世纪优秀人才计划项目（批准号：NCET-10-0976）、宁波市自然科学基金（批准号：2011A610189）和宁波大学王宽诚幸福基金资助的课题. （）
