物理学报2012，Vol.61Issue(8)：176-182,7.
全息光栅曝光系统中空间滤波器孔径与激光束腰关系的选择方法
The ratio choice method of the pinhole aperture to the waist of the Gaussian laser in the fabrication of holographic gratings
摘要
Abstract
In the fabrication of the holographic diffraction gratings, the scatter light which is produced by the reflection of the granule in air or the diffraction defect of the optical apparatus will be recorded simultaneously in the resist. Those noises not only reduce the diffraction efficiency of gratings, but also give rise to the scattered light in diffraction. So an appropriate spatial filter should be used to stop the higher spatial frequencies corresponding to the Gaussian beam. Because the diffraction effect after the pinhole aperture can demolish the wavefronts of laser, it is the most important to choose the optimal pinhole for adjusting the waist of the laser. On the basis of standard scalar diffraction theory, the field amplitude is given by the convolution calculation, the phase distortion of diffraction wavefronts is also analyzed, and the lower limit ratio of the aperture size with respect to the beam radius is given when the phase transitions are further away from the center. Using the energy conservation of Gaussian beam and comparing the characteristics change of diffraction beam, the effect of diffraction is presented and the upper limit ratio of the spatial filter is given by the critical condition of the diffraction. The conclusion shows that if the ratio of the aperture radius to beam waist is between 1.52 〈 a/wo 〈 2.2, the phase is invariable in the area of the exposal, and the power transmitting the spatial-filter pinhole aperture is slightly more than 99%, so spatial filter performs its function only in this range of the radio.关键词
全息光栅/空间滤波器/衍射效应/相位突变Key words
holographic gratings/spatial filter/diffraction effects/phase distortion分类
数理科学引用本文复制引用
韩建,巴音贺希格,李文吴..全息光栅曝光系统中空间滤波器孔径与激光束腰关系的选择方法[J].物理学报,2012,61(8):176-182,7.基金项目
国家自然科学基金（批准号：60478034）、国家科技支撑计划（批准号：2006BAK03A02）和吉林省科技发展计划（批准号：20070523,20086013）资助的课题. （）
