物理学报2012，Vol.61Issue(8)：440-445,6.
紫外波段SiO2／Si3N4介质膜分布式布拉格反射镜的制备与研究
Design and fabrication of SiO2/Si3N4 dielectric distributed Bragg reflectors for ultraviolet optoelectronic applications
摘要
Abstract
In this paper, we design a SiO2/Si3N4 dielectric distributed Bragg reflector （DDBR） by the transfer-matrix method, which is grown by plasma-enhanced chemical vapor deposition on sapphire （0001）. There exists a slight difference between theoretical and experimental results in peak wavelength （- 10 nm）. The peak wavelength is blue shifted with the number of DDBR pairs increasing. The 13-pair DDBR provides a 58 nm wide stop band centered at 333 nm with a maximal reflectivity of higher than 99%, as the refractive index ratio of Si3N4 to SiO2 is relatively high. It is proved by the scanning electron microscope and atomic force microscope measurements that the variations of thickness and roughness of Si3N4 layer with respect to SiO2 layer during growth contribute to the blue shift of peak wavelength. The X-ray reflectivity measurements indicate that the interfacial degradation of the samples has little effect on the maximum reflectivity, and the relatively poor quality of SiO2 compared with Si3N4 may be one of the reasons that cause the difference between the measurements and simulations.关键词
介质膜分布式布拉格反射镜/传递矩阵方法/x射线反射Key words
dielectric distributed Bragg reflector/transfer-matrix method/X-ray reflection分类
信息技术与安全科学引用本文复制引用
李志成,刘斌,张荣,张曌,陶涛,谢自力,陈鹏,江若琏,郑有蚪,姬小利..紫外波段SiO2／Si3N4介质膜分布式布拉格反射镜的制备与研究[J].物理学报,2012,61(8):440-445,6.基金项目
国家重点基础研究发展计划（批准号：2011CB301900）、国家自然科学基金（批准号：60990311,60906025,60936004,10904100,61176063）、江苏省高等学校自然科学基金（批准号：BK2010385,BK2010178）、霍英东教育基金（批准号：122028）、中央高等学校基本科研基金（批准号：1105021008）和高等学校博士学科点专项科研基金（批准号：20090091120020）资助的课题. （）
